Next-generation fluorosurfactant-free materials for semiconductor sealing

Trelleborg Sealing Solutions is dedicated to supporting the semiconductor manufacturing industry with innovative and reliable seals. As regulations evolve, our PureFab® fluorosurfactant-free portfolio is engineered to help you reduce regulatory risks and strengthen your supply chain.

Specifically engineered for challenging conditions, these advanced materials are manufactured without fluorosurfactants, to help you transition to solutions with a lower environmental impact, while offering exceptional high-purity sealing performance.
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PureFab® fluorosurfactant-free materials webinar

Trelleborg Sealing Solutions engineers introduce our fluorosurfactant-free elastomers for semiconductor sealing and demonstrate how the materials can enhance reliability in demanding semiconductor processes.
Come back soon to register for the PureFab® fluorosurfactant-free materials webinar

Isolast® PureFab® JPF50

High-purity FFKM for semiconductor applications
Isolast® PureFab® JPF50 is a high-purity perfluoroelastomer (FFKM) formulated to meet the stringent purity and plasma resistance demands of advanced semiconductor manufacturing processes. It is manufactured without fillers or fluorosurfactants, which reduces the environmental impact, extends service life and increases yields.
Isolast® PureFab® JPF11 JPF50 1
Features and benefits of Isolast® PureFab® JPF50:
  • Manufactured without fluorosurfactants to help lower the environmental footprint
  • Delivers outstanding plasma resistance across diverse chemistries and the most common thin-film precursors, supporting extended seal service life
  • Helps reduce risks of contamination and maximize process yields through its extremely low outgassing and minimal particle emission
  • Performs exceptionally at high temperatures, with capabilities up to +300°C/+572 °F, thereby ensuring reliable sealing in the harshest environments
  • Designed with low compression set and robust mechanical strength to support longer intervals between maintenance and help minimize unplanned downtime
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Application examples:
  • Seals and components within deposition processes (PECVD, HDPCVD, PEALD) and etching processes (ALE, dry etching)
  • Chamber lid and gas inlet seals
  • Bonded slit valve door seals
Download the Isolast® PureFab® JPF50 flyer

Isolast® PureFab® JPF58

High-temperature FFKM for semiconductor applications
Isolast_Purefab_JPF41 JPF42 JPF44 JPF58 01
Isolast® PureFab® JPF58 is a thermal-resistant FFKM developed for sustained operation in the most extreme temperature environments where long-term thermal stability and purity are essential. Manufactured without fluorosurfactants, it helps lower environmental impact while delivering purity and reliable performance in challenging semiconductor applications to extend service life.
Features and benefits of Isolast® PureFab® JPF58:
  • Manufactured without fluorosurfactants to help lower the environmental footprint
  • Delivers exceptional thermal stability, performing up to +300 °C/+590 °F for consistent seal integrity over extended use
  • Resists cracking when exposed to high mechanical and thermal stress, contributing to longer service lives
  • Withstands exposure to harsh process and exhaust gases, providing proven reliability in demanding semiconductor applications
  • Maintains dimensional stability during continuous operation under high loads and elevated temperatures

Application examples:
  • Seals and components within high-temperature processes including RTP, ALD, CVD and diffusion furnaces
  • Quartz tube, plenum, chamber and furnace door seals
  • Exhaust and vacuum connection flanges and centering rings
Download the Isolast® PureFab® JPF58 flyer

PureFab® VPF20

High-purity FKM for semiconductor sealing 
PureFab® VPF20 is a high-purity fluoroelastomer (FKM) engineered without fluorosurfactants, reducing environmental impact while ensuring contamination-free production. Designed to meet the stringent demands of semiconductor and flat panel display manufacturing, it combines a non-fluorosurfactant base polymer with a high-purity synthetic filler system to deliver exceptional performance and reliability in purity-critical applications
PureFab® VPF20 1
Features and benefits of PureFab® VPF20:
  • Manufactured without fluorosurfactants to help lower the environmental footprint
  • High-purity FKM formulation with synthetic fillers to help minimize metallic contaminants and ionic extractables
  • Robust mechanical strength and elastic recovery provide greater durability in both static and dynamic sealing applications compared to standard FKM materials
  • Demonstrates strong chemical resistance with key semiconductor process chemistries
  • Delivers a more cost-effective option than FFKM for applications with moderate temperatures and medium chemical demand
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Application examples:
  • Seals in transfer modules, load locks, Equipment Front End Module (EFEM) and vacuum handling systems
  • General purpose vacuum seals and flat panel display manufacturing equipment
  • Purity-critical applications where standard black FKMs risk contamination
Download the PureFab® VPF20 flyer

Sealing expertise for semiconductor manufacturing

Trelleborg Sealing Solution applies decades of materials and applications expertise to deliver high-performance sealing solutions for semiconductor manufacturing. We develop innovative, high-precision polymer technologies that ensure reliability, improve process purity and reduce equipment downtime in the harshest environments.
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Semiconductor Manufacturing
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Isolast PureFab FFKM for Semiconductor Sealing Applications
Isolast® PureFab® FFKM

Maximize system uptime of advanced semiconductor processes

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Technical questions and answers

  • Are fluorosurfactant-free materials as effective as standard elastomers?
    Yes, fluorosurfactant-free materials provide exceptional high-purity sealing performance. They offer outstanding plasma resistance, thermal stability and chemical compatibility without relying on harmful additives.
  • What is the maximum temperature limit for PureFab® fluorosurfactant-free materials?
    High-temperature FFKM grades like Isolast® PureFab® JPF50 and JPF58 can perform continuously at temperatures up to +300 °C/+590 °F.
  • What are the advantages of fluorosurfactant-free elastomers in semiconductor manufacturing?
    Fluorosurfactant-free elastomers offer key advantages in semiconductor manufacturing by supporting high purity, low contamination and consistent process performance. By eliminating fluorosurfactants, these materials align with evolving regulatory expectations while maintaining excellent chemical resistance, thermal stability and durability. This makes them ideal for advanced semiconductor processes where material cleanliness and reliability are essential.
  • Where are fluorosurfactant-free elastomers used in semiconductor equipment?
    Fluorosurfactant-free elastomers are used across a wide range of semiconductor equipment, including deposition and etching systems, vacuum chambers, gas delivery systems and transfer modules. They provide reliable sealing performance in environments exposed to aggressive chemistries, high temperatures and vacuum conditions, helping to maintain stable and high-purity manufacturing processes.