Trelleborg Sealing Solutions launches four best-in-class materials in its Isolast® PureFab™ range specifically engineered for critical semiconductor sealing applications. For original equipment manufacturers & Fabs, utilizing these unique perfluoroelastomer (FFKM) formulations will provide an increased product yield and decrease process defects. In turn, this reduces downtime, extends product maintenance cycles, gives greater process tool uptime, and results in a lower total cost of ownership.
With excellent mechanical properties, all the ‘Fab Four’ semiconductor materials demonstrate the highest purity of their kind, without compromising plasma resistance, outgassing and thermal stability. Individually, the materials are best-in-class for specific characteristics:
Trelleborg Sealing Solutions material engineers and semiconductor experts have hosted a free-to-attend webinar to introduce these new sealing materials and demonstrate how they can save time and costs for semiconductor manufacturers.
Fully organic material for demanding high temperature applications
• Fully organic structure
• High purity
• Excellent fluorine and oxygen radical plasma resistance
• Low particle generation
• High-temperature stability over +300°C
• Excellent chemical resistance, including in steam and amines
• Suitable for processes including dry etching, stripping and remote plasma cleaning
Isolast® PureFab™ – The ultimate high purity, plasma sealing performance for critical semiconductor applications
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