高性能半導体向けシーリングソリューション
このような過酷な条件下において、トレルボルグ シーリング ソリューションズの高性能シールは真価を発揮します。
高いクリーン度、優れた耐薬品性、そして稼働時間の延長を実現し、高い歩留まりを実現します。
高いクリーン度、優れた耐薬品性、そして稼働時間の延長を実現し、高い歩留まりを実現します。
広範囲にわたる試験を経て開発された、トレルボルグ シーリング ソリューションズの先端高純度FFKM材料「Isolast®(イソラスト) PureFab®」は、金属溶出やパーティクルが極めて低いシール材料です。プラズマによる浸食率の低さ、高温環境での安定性、ドライおよびウェットの各種プロセス薬品に対する優れた耐性、そして卓越したシール性能を兼ね備えており、信頼性の高いシール材としてTCO(Total Cost of Ownership)の削減に貢献します。さらに、製品の純度を確保するため、すべてのIsolast® (イソラスト) PureFab®シールはクラス100（ISO5）クリーンルーム環境下で製造・包装されています。
各地域でのサポート、グローバルなネットワーク、半導体分野に特化した専任エキスパートのサポートという3本の柱によって、設計、試作、納入、そして量産にいたるまで最高クラスのサービスを提供します。これらの優れたサポート体制と当社のデジタルツールによって、お客様の製品開発がよりスムーズに運べるよう支援しています。
Products
Our diverse portfolio includes solutions such as O-Rings, CMP membranes and bonded slit valve door seals - delivering exceptional purity, process integrity and long-term reliability for demanding semiconductor environments.
Materials
Our advanced polymer materials, such as Isolast® PureFab®, offer ultra-high purity, exceptional chemical compatibility and outstanding thermal stability - delivering reliable performance for critical semiconductor processes.
Application expertise across semiconductor processes
Our solutions are engineered for critical plasma, subfab, thermal and wet semiconductor processes, using ultra-high purity materials that guard against contamination and stand up to harsh chemicals, plasma and extreme temperatures.
Plasma processes
We use ultra-high purity materials to create reliable, long-lasting seals for plasma processes that limit outgassing and contamination, supporting higher yields and consistent performance.
Subfab processes
Our advanced sealing solutions for subfab environments deliver reliable performance under extreme conditions. By maintaining ultra-clean standards and withstanding aggressive chemicals and thermal cycling, these components help ensure reliable system operation and consistent uptime.
Thermal processes
We deliver reliable sealing solutions for thermal processes with Isolast® PureFab® materials that combine robust mechanical strength and chemical compatibility. These seals endure high temperatures, are compatible with aggressive chemicals and help minimize particle generation, supporting reliable performance and clean production conditions that contribute to higher process yields.
Wet processes
Our Isolast® PureFab® seals deliver outstanding chemical compatibility and ultra-low extractables for wet processes. Engineered to minimize contamination and support clean operations, these solutions help maintain process integrity and consistent yields in demanding environments.
Research & development and global manufacturing
Our local for local strategy ensures design, prototyping and delivery are fast and adaptable, helping accelerate your time to market. As your development partner, we collaborate from concept to completion, accelerating time to market with rapid design and a steadfast commitment to innovation in semiconductor manufacturing.
Research & development
Trelleborg Sealing Solutions combines decades of engineering expertise with ongoing material innovation to deliver high-precision sealing solutions.
Our advanced R&D and material testing support compound development, material characterization, comparison, failure investigation and application-specific engineering decisions to maximize efficiency.
Global manufacturing footprint
Our global manufacturing network of more than 35 manufacturing facilities delivers fast, flexible production, consistent quality and local sourcing for responsive support and shorter lead times.
Among our dedicated semiconductor sites, Malta excels in cleanroom manufacturing, Tewkesbury, UK combines cleanroom manufacturing and R&D testing, including a plasma lab and Yongin, South Korea stands out as a leading R&D center with advanced plasma testing.
Semiconductor resources and technical guidance
Explore our resources to discover how Trelleborg's engineered polymer solutions can enhance your semiconductor manufacturing processes.
ブローシャー
半導体向けポリマーソリューション
半導体業界向けシールソリューション
半導体業界向けシールソリューション
バーチャルショールーム
半導体ギャラリーをご覧いただき、タイム・トゥー・マーケットを短縮するためのシールソリューションをご確認ください。
In the Groove
Insights and Innovations
Explore our digital magazine featuring the latest industry news, trends and technological advancements.
On-demand semiconductor webinars
Explore our on-demand webinars, offering technical insights and solutions to industry-specific challenges.
Engineering tools for seal specification
Discuss your semiconductor application
Share your application-specific requirements and connect with our experts to find the optimal sealing solution. As a first step, the respective component, media and plasma exposure, temperature, pressure or vacuum, motion, purity limits and hardware help to kick-start conversations about reliable solutions. Our semiconductor experts will identify relevant products and materials and define the next engineering and validation steps together with you.