Semiconductor Sealing Solutions

As trends promising huge growth, such as Artificial Intelligence (AI), 5G, machine learning, and high-performance computing, drive semiconductor manufacturers’ innovation, accelerating time to market while reducing total cost of ownership is becoming critical.

Miniaturization has brought feature sizes down to the smallest that are hardly imaginable, while architectures are continually becoming ever more sophisticated. These factors mean achieving high yields with acceptable costs is increasingly difficult for chipmakers, and they also intensify the demands on high-tech seals and complex elastomer components used in processing equipment, such as state-of-the-art photolithography systems.

Reduced product dimensions lead to components that are highly sensitive to contamination, so cleanliness and purity are more important than ever. Aggressive chemicals and plasmas utilized under extreme temperature and pressure conditions create a tough environment. Solid technology and reliable materials are therefore vital in maintaining high process yield.

High-Performance Semiconductor Sealing Solutions

Under these conditions, high-performance seals from Trelleborg Sealing Solutions come to the fore, guaranteeing cleanliness, chemical resistance, and extension of the uptime cycle for maximum yield.

A result of extensive development and testing, leading-edge high purity Isolast® PureFab® FFKM materials from Trelleborg Sealing Solutions ensure extremely low trace metal content and particle release. Low plasma erosion rates, high temperature stability and excellent resistance to dry and wet process chemistries combined with excellent sealing performance are key characteristics of these reliable seals that lower total cost of ownership. And to ensure purity of product, all Isolast® PureFab® seals are produced and packed in a Class 100 (ISO5) cleanroom environment.

Benefit from local specialist support, global reach and dedicated regional semiconductor experts. These three pillars ensure best in class service levels, from design, prototype and delivery through to serial production. This industry-leading design support and our digital tools are key assets to accelerate performance.

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