Isolast® PureFab® FFKM for Advanced Semiconductor Processes
Dr. Murat Gulcur, Materials Development Manager - Semicon
Isolast® PureFab™ FFKM materials reduce downtime, extend product maintenance cycles and give greater process tool uptime. In this session:
- Learn the new Isolast® PureFab™ FFKM material range, and the unique characteristics of the different materials
- Find out about the intensive testing process undertaken to prove the performance of these materials, including plasma erosion tests in the most common process gasses, long-term mechanical tests, and purity tests including trace metal analysis and outgassing
- Determine how extensive competitor benchmarking helps identify the best offering and reduces risk when qualifying new materials in highly sensitive environments
- Discover how this material saves time & costs for semiconductor manufacturers
- Understand how Isolast® PureFab™ FFKM materials extend seal life and prevent contamination, even in the most demanding semiconductor processes
>> Find out more about our portfolio of Isolast® PureFab® materials