Choose the right product for your application
Our product portfolio is built on advanced engineering, cutting-edge polymer materials and industry knowledge, offering sealing solutions that deliver exceptional performance in critical semiconductor manufacturing environments. With proven reliability, purity and innovation at their core, our solutions focus on minimizing downtime, increasing yield and reducing total cost of ownership.
Semiconductor O-Rings
Flexible and cost-effective, O-Rings are ideal for static applications in semiconductor processes. Made with advanced materials, they provide exceptional sealing in critical environments to maintain process integrity. Available in a full range of sizes to suit your needs.
FlexiMold™ O-Rings
Our proprietary FlexiMold™ technology produces high-precision, large-diameter O-Rings and seals with the full integrity of a molded product. This innovative process minimizes lead times and reduces costs by producing parts without the need for dedicated tooling.
Bonded Slit Valve Door Seals
Engineered for optimal performance, these seals combine advanced elastomers with a bonded metal door design to significantly reduce abrasion and particulation. This innovative construction enhances seal life, eliminates installation errors and extends service life, making it ideal for demanding semiconductor applications.
CMP membranes for wafer polishing
Ensuring optimal results during critical chemical mechanical polishing (CMP) processes, our CMP membranes are designed for exceptional wafer planarity and uniform polishing. Made from high-consistency silicone rubber (HCR) and liquid silicone rubber (LSR), they offer excellent chemical compatibility and durability. Built to withstand CMP's demanding conditions, these membranes deliver reliable performance and long-lasting resilience.
Complex molded parts and bonded components
We collaborate with customers from the initial design stage to create customized polymer solutions using one or multiple materials. Our advanced rubber-to-metal and rubber-to-plastic components enable multifunctional designs that enhance overall equipment performance and reduce maintenance requirements.
These specialized solutions include low-outgassing dampeners for vibration control applications and edge exclusion wafer seals that prevent electroplating chemical solutions from reaching wafer edges during immersion and high-speed spinning processes.
Turcon® Variseal® spring-energized seals
The Variseal® is a spring-energized seal designed for both dynamic and static conditions. It delivers reliable performance in high vacuum and corrosive environments. This makes it an ideal solution for demanding semiconductor systems where uptime is critical.
Isolast® K-Fab™ flange seal for subfab systems
Designed for critical subfab applications, the Isolast® K-Fab™ flange seal ensures reliable performance under extreme temperatures and harsh chemicals. Its optimized elastomer design reduces material use, enhances thermal properties and prevents common issues like thermal expansion.
Airseal
Used on load locks and access doors in advanced vertical furnaces, Airseals are inflatable seals made from high-grade rubber materials. They effectively replace traditional flat gaskets and O-Rings, providing reliable sealing under both vacuum and positive pressure.
Turcon® Varilip® PDR rotary seals
Characterized by low friction and stick-slip-free operation, the Turcon® Varilip® PDR seal reduces power consumption and temperature generation. Its design requires significantly less torque, resulting in a longer service life. This maximizes the time between planned maintenance, boosting your overall productivity.
Wills Rings® metal seals
When the capabilities of polymeric seals are exceeded, Wills Rings® provide a robust solution. These static metal face seals are designed for use in extreme conditions. Available in a wide range of metals and specialized coatings, they ensure sealing integrity in the most challenging semiconductor applications.
Engineered polymer solutions
Our engineered plastics are perfect for wafer processing and handling, offering enhanced performance and simplified assembly. Ideal for sub assemblies, they combine seamlessly with machined parts and seals. These plastics are also used as inserts in overmolded Isolast® FFKM wafer carrier seals, providing added rigidity and stability.
Seal-Glide® coatings and surface treatments
Our Seal-Glide® coatings and surface treatments are designed to improve the stiction and friction characteristics of elastomer seals. By enhancing wear resistance and reducing the sticking force between surfaces, these treatments support reliable sealing in dynamic applications.
Custom engineering and manufacturing capabilities
Our semiconductor capabilities extend beyond the listed product families. We tailor materials, designs and solutions to your specific operating conditions.
Our custom engineering and collaborative approach support you from design to delivery. It includes application review, material selection, seal and component design, finite element analysis, rapid prototyping, custom molding, rubber-to-metal or rubber-to-plastic bonding, cleanroom production, testing and manufacturing scale-up.
Share your application-specific requirements and connect with our experts to find the optimal sealing solution tailored to your exact needs.