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Explore Sealing Solutions for Dry Processing Capabilities 

Maximizing system uptime for increased product yield 
Dry processing is a key process used in semiconductor fabrication. By preventing contamination, ensuring process stability and minimizing particle-related issues, high-performance seals improve yield, device quality and manufacturing efficiency.
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Gas Injector Seals
  • Resistance against all process gases
  • High purity
  • Long-term reliability
Suitable Materials:
Isolast® PureFab® JPF10
Isolast® PureFab® JPF20
Find out more about lsolast® PureFab®
Virtual Showroom

Showerhead Seals
  • Extremely high plasma resistance
  • Best-in-class purity
  • Low trace metal contenty
Suitable Materials:
Isolast® PureFab® JPF10
Isolast® PureFab® JPF20
Find out more about lsolast® PureFab®
Virtual Showroom

Chamber Lid Seals
  • Ultra-low particle generation
  • Extremely high plasma resistance
  • Best-in-class outgassing performance
Suitable Materials:
Isolast® PureFab® JPF10
Isolast® PureFab® JPF20
Find out more about lsolast® PureFab®
Virtual Showroom

Window/Viewport Seals
  • Ultra-low outgassing performance
  • Available in various sizes and shapes
Suitable Materials:
Isolast® PureFab® JPF10
Isolast® PureFab® JPF22
Find out more about lsolast® PureFab®
Virtual Showroom

E-Chuck Seals
  • Ultra-low particle generation
  • Extremely high plasma resistance
  • Best-in-class purity
Suitable Materials:
Isolast® PureFab® JPF10
Isolast® PureFab® JPF30
Find out more about lsolast® PureFab®
Virtual Showroom

Subfab Processes

These processes, including vacuum pump and abatement applications, require seals that offer:

  • Excellent high-temperature performance
  • Outstanding chemical compatibility
  • Long sealing life

Suitable Materials:
Isolast® PureFab® JPF21
Isolast® PureFab® JPF40
Find out more about lsolast® PureFab®
Virtual Showroom

Deposition Process

These processes require seals that offer:

  • Market-leading outgassing properties
  • Suitable for use with aggressive precursor chemicals
  • Excellent thermal stability
  • Ultra-high leading purity

Suitable Materials:
Isolast® PureFab® JPF10
Isolast® PureFab® JPF21
Isolast® PureFab® JPF40
Find out more about lsolast® PureFab®
Virtual Showroom

Dry Etch Process

These processes require seals that offer:

  • Excellent plasma resistance
  • Outstanding plasma crack resistance
  • Low particulation
  • Market-leading purity
Suitable Materials:
Isolast® PureFab® JPF10
Isolast® PureFab® JPF20
Isolast® PureFab® JPF30
Find out more about lsolast® PureFab®
Virtual Showroom

Isolast®K-Fab™
  • Error-proof Assembly
    A puzzle-shaped connection holds the seal on to the metal insert during handling and assembly
  • High Temperature Capability
    Wide selection of materials enables high-temperature applications up to +327 °C/+621 °F
  • Superior Sealing Performance
    When compressed, the puzzle-shaped design acts as a retention mechanism and increases the axial sealing force when energized
  • Long Service Life
    Double-acting sealing profile increases the sealing performance, especially with varying pressure/vacuum conditions
  • No Overfill or Extrusion
    Compared to an O-Ring, K-Fab™ has significantly less rubber volume which prevents overfill and extrusion due to thermal expansion
Suitable Materials:
Isolast® K-Fab™ Flange Seal Find out more about lsolast® PureFab®

Slit Valve Doors
  • Long-term sealing integrity
  • Excellent plasma resistance
  • Best-in-class outgassing performance
Suitable Materials:
Isolast® PureFab® JPF10
Isolast® PureFab® JPF20
Isolast® PureFab® JPF30
Isolast® PureFab® JPF40
Find out more about lsolast® PureFab®
Virtual Showroom

Wafer Support and Transfer Pads
  • Low stiction
  • Best-in-class purity
  • Various shapes and designs available
Suitable Materials:
Isolast® PureFab® JPF10
Isolast® PureFab® JPF22
Find out more about lsolast® PureFab®
Virtual Showroom

Process Precursor Canister Seals
  • Low permeation
  • High purity
Compatible with all gases including amine-based substances, e.g. TDMAT Suitable Materials:
Isolast® PureFab® JPF10
Isolast® PureFab® JPF40
Find out more about lsolast® PureFab®
Virtual Showroom

Process Gas Delivery Valve Seals
  • Compatible with all process gases
  • High purity
  • Long-term reliability
Compatible with all gases including amine-based substances, e.g. TDMAT Suitable Materials:
Isolast® PureFab® JPF10
Isolast® PureFab® JPF20
Isolast® PureFab® JPF22
Find out more about lsolast® PureFab®
Virtual Showroom

Main Chamber Body Seals
  • Ultra-low outgassing performance
  • Low permeation
  • Full range of sizes including Fleximold™ large diameter seals
Compatible with all gases including amine-based substances, e.g. TDMAT Suitable Materials:
Isolast® PureFab® JPF10
Isolast® PureFab® JPF22
Find out more about lsolast® PureFab®
Virtual Showroom
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