Gas Injector Seals

• Resistance against all process gases
• High purity
• Long-term reliability

Suitable Materials:
Isolast® PureFab™ JPF10
Isolast® PureFab™ JPF20
Find out more about lsolast® PureFab™
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Showerhead Seals

• Extremely high plasma resistance
• Best-in-class purity
• Low trace metal contenty

Suitable Materials:
Isolast® PureFab™ JPF10
Isolast® PureFab™ JPF20
Find out more about lsolast® PureFab™
Virtual Showroom

Chamber Lid Seals

• Ultra-low particle generation
• Extremely high plasma resistance
• Best-in-class outgassing performance

Suitable Materials:
Isolast® PureFab™ JPF10
Isolast® PureFab™ JPF20
Find out more about lsolast® PureFab™
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Window/Viewport Seals

• Ultra-low outgassing performance
• Available in various sizes and shapes

Suitable Materials:
Isolast® PureFab™ JPF10
Isolast® PureFab™ JPF22
Find out more about lsolast® PureFab™
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E-Chuck Seals

• Ultra-low particle generation
• Extremely high plasma resistance
• Best-in-class purity

Suitable Materials:
Isolast® PureFab™ JPF10
Isolast® PureFab™ JPF30
Find out more about lsolast® PureFab™
Virtual Showroom

Subfab Processes

These processes, including vacuum pump and abatement applications, require seals that offer:

• Excellent high-temperature performance
• Outstanding chemical compatibility
• Long sealing life

Suitable Materials:
Isolast® PureFab™ JPF21
Isolast® PureFab™ JPF40
Find out more about lsolast® PureFab™
Virtual Showroom

Deposition Process

These processes require seals that offer:

• Market-leading outgassing properties
• Suitable for use with aggressive precursor chemicals
• Excellent thermal stability
• Ultra-high leading purity

Suitable Materials:
Isolast® PureFab™ JPF10
Isolast® PureFab™ JPF21
Isolast® PureFab™ JPF40
Find out more about lsolast® PureFab™
Virtual Showroom

Dry Etch Process

These processes require seals that offer:

• Excellent plasma resistance
• Outstanding plasma crack resistance
• Low particulation
• Market-leading purity

Suitable Materials:
Isolast® PureFab™ JPF10
Isolast® PureFab™ JPF20
Isolast® PureFab™ JPF30
Find out more about lsolast® PureFab™
Virtual Showroom

Isolast®K-Fab™

• Error-proof Assembly
  A puzzle-shaped connection holds the seal on to the metal insert during handling and assembly
• High Temperature Capability
  Wide selection of materials enables high-temperature applications up to +327 °C/+621 °F
• Superior Sealing Performance
  When compressed, the puzzle-shaped design acts as a retention mechanism and increases the axial sealing force when energized
• Long Service Life
  Double-acting sealing profile increases the sealing performance, especially with varying pressure/vacuum conditions
• No Overfill or Extrusion
  Compared to an O-Ring, K-Fab™ has significantly less rubber volume which prevents overfill and extrusion due to thermal expansion

Suitable Materials:
Isolast® K-Fab™ Flange Seal Find out more about lsolast® PureFab™

Slit Valve Doors

• Long-term sealing integrity
• Excellent plasma resistance
• Best-in-class outgassing performance

Suitable Materials:
Isolast® PureFab™ JPF10
Isolast® PureFab™ JPF20
Isolast® PureFab™ JPF30
Isolast® PureFab™ JPF40
Find out more about lsolast® PureFab™
Virtual Showroom

Wafer Support and Transfer Pads

• Low stiction
• Best-in-class purity
• Various shapes and designs available

Suitable Materials:
Isolast® PureFab™ JPF10
Isolast® PureFab™ JPF22
Find out more about lsolast® PureFab™
Virtual Showroom

Process Precursor Canister Seals

• Low permeation
• High purity

Compatible with all gases including amine-based substances, e.g. TDMAT Suitable Materials:
Isolast® PureFab™ JPF10
Isolast® PureFab™ JPF40
Find out more about lsolast® PureFab™
Virtual Showroom

Process Gas Delivery Valve Seals

• Compatible with all process gases
• High purity
• Long-term reliability

Compatible with all gases including amine-based substances, e.g. TDMAT Suitable Materials:
Isolast® PureFab™ JPF10
Isolast® PureFab™ JPF20
Isolast® PureFab™ JPF22
Find out more about lsolast® PureFab™
Virtual Showroom

Main Chamber Body Seals

• Ultra-low outgassing performance
• Low permeation
• Full range of sizes including Fleximold™ large diameter seals

Compatible with all gases including amine-based substances, e.g. TDMAT Suitable Materials:
Isolast® PureFab™ JPF10
Isolast® PureFab™ JPF22
Find out more about lsolast® PureFab™
Virtual Showroom