Trelleborg launches fluorosurfactant-free semiconductor sealing solutions
Date: 12.08.26
Trelleborg Sealing Solutions launches an innovative range of fluorosurfactant-free materials for semiconductor manufacturing.
As global regulators and semiconductor manufacturers increasingly focus on reducing per- and polyfluoroalkyl substances (PFAS) due to their potential impacts on human health and the environment, Trelleborg adds three new fluorosurfactant-free* materials to its extensive PureFab® materials range.
>>Discover innovative fluorosurfactants-free sealing solutions
Chris Busby, Global Segment Director Semiconductor, says: “These new high-temperature perfluoroelastomer (FFKM) and fluoroelastomer (FKM) materials are ‘fluorosurfactactant free’, meaning they are made without low-molecular-weight PFAS fluorosurfactants. As regulations to reduce PFAS use evolve, these new materials can help future proof customers against regulatory risk and strengthen their supply chain.
“The new materials - two FFKMs JPF50 and JPF58, and FKM VPF20 - function without any compromise on the materials’ performance and durability. We invite any interested customers to arrange samples for testing.”
Reduced contamination risk and maximized yield
Isolast® PureFab® JPF50 is a high-purity FFKM formulated to meet stringent purity and plasma resistance requirements across diverse chemistries and the most common thin-film precursors. It is manufactured without fillers or fluorosurfactants, extends service life and increases yields.
JPF50 helps reduce risks of contamination and maximizes process yields through its extremely low outgassing and minimal particle emission, performing exceptionally at high temperatures of up to +300°C/+572 °F, ensuring reliable sealing in the harshest environments. It is designed with low compression set and robust mechanical strength to support longer intervals between maintenance and help minimize unplanned downtime.
JPF50 excels for seals and components within deposition processes (PECVD, HDPCVD, PEALD) and etching processes (ALE, dry etching), and is ideal for chamber lid and gas inlet seals as well as bonded slit valve door seals.
Exceptional stability for extreme temperatures
Isolast® PureFab® JPF58 is an FFKM developed for sustained, reliable operation in the most extreme temperature environments where long-term thermal stability and purity are essential.
JPF58 delivers exceptional thermal stability up to +300 °C/+572 °F for consistent seal integrity over extended use, and resists cracking when exposed to high mechanical and thermal stress, contributing to longer service life. Withstanding exposure to harsh process and exhaust gases, JPF58 provides proven reliability in demanding applications, maintaining dimensional stability during continuous operation under high loads and elevated temperatures.
The material is ideal for seals and components within high-temperature processes including RTP, ALD, CVD and diffusion furnaces, quartz tube, plenum, chamber and furnace door seals, and exhaust and vacuum connection flanges and centering rings.
Increased durability in purity critical applications
PureFab® VPF20 is a high-purity fluoroelastomer (FKM) which ensures contamination-free production to meet the stringent demands of semiconductor and flat panel display manufacturing. It combines a fluorosurfactant-free base polymer with high-purity synthetic fillers to help minimize metallic contaminants and ionic extractables, delivering exceptional performance and reliability in purity critical applications.
With robust mechanical strength and elastic recovery, VPF20 provides greater durability in both static and dynamic sealing applications, and demonstrates strong chemical resistance with key process chemistries. VPF20 delivers a more cost-effective option than FFKM for applications with moderate temperatures and medium chemical demands.
It is ideal for manufacturing seals in transfer modules, load locks, equipment front end modules (EFEM) and vacuum handling systems, general purpose vacuum seals and flat panel display manufacturing equipment, and purity critical applications where standard black FKMs risk contamination.
>>Discover the entire Isolast® PureFab® range
The entire PureFab® range includes materials providing excellent performance in aggressive front-end processes including deposition, etch, ash/strip, plasma cleaning and thermal processing such as atomic layer deposition.
>>Find out more about Trelleborg semiconductor sealing solutions
* Fluorosurfactant-free materials mean that PFAS fluorosurfactants are not used intentionally. To the best of our knowledge and based on available information, these materials do not contain PFAS fluorosurfactants. However it cannot be guaranteed that these may not contain trace amounts of PFAS fluorosurfactants that occur unintentionally.
>>Discover innovative fluorosurfactants-free sealing solutions
Chris Busby, Global Segment Director Semiconductor, says: “These new high-temperature perfluoroelastomer (FFKM) and fluoroelastomer (FKM) materials are ‘fluorosurfactactant free’, meaning they are made without low-molecular-weight PFAS fluorosurfactants. As regulations to reduce PFAS use evolve, these new materials can help future proof customers against regulatory risk and strengthen their supply chain.
“The new materials - two FFKMs JPF50 and JPF58, and FKM VPF20 - function without any compromise on the materials’ performance and durability. We invite any interested customers to arrange samples for testing.”
Reduced contamination risk and maximized yield
Isolast® PureFab® JPF50 is a high-purity FFKM formulated to meet stringent purity and plasma resistance requirements across diverse chemistries and the most common thin-film precursors. It is manufactured without fillers or fluorosurfactants, extends service life and increases yields.
JPF50 helps reduce risks of contamination and maximizes process yields through its extremely low outgassing and minimal particle emission, performing exceptionally at high temperatures of up to +300°C/+572 °F, ensuring reliable sealing in the harshest environments. It is designed with low compression set and robust mechanical strength to support longer intervals between maintenance and help minimize unplanned downtime.
JPF50 excels for seals and components within deposition processes (PECVD, HDPCVD, PEALD) and etching processes (ALE, dry etching), and is ideal for chamber lid and gas inlet seals as well as bonded slit valve door seals.
Exceptional stability for extreme temperatures
Isolast® PureFab® JPF58 is an FFKM developed for sustained, reliable operation in the most extreme temperature environments where long-term thermal stability and purity are essential.
JPF58 delivers exceptional thermal stability up to +300 °C/+572 °F for consistent seal integrity over extended use, and resists cracking when exposed to high mechanical and thermal stress, contributing to longer service life. Withstanding exposure to harsh process and exhaust gases, JPF58 provides proven reliability in demanding applications, maintaining dimensional stability during continuous operation under high loads and elevated temperatures.
The material is ideal for seals and components within high-temperature processes including RTP, ALD, CVD and diffusion furnaces, quartz tube, plenum, chamber and furnace door seals, and exhaust and vacuum connection flanges and centering rings.
Increased durability in purity critical applications
PureFab® VPF20 is a high-purity fluoroelastomer (FKM) which ensures contamination-free production to meet the stringent demands of semiconductor and flat panel display manufacturing. It combines a fluorosurfactant-free base polymer with high-purity synthetic fillers to help minimize metallic contaminants and ionic extractables, delivering exceptional performance and reliability in purity critical applications.
With robust mechanical strength and elastic recovery, VPF20 provides greater durability in both static and dynamic sealing applications, and demonstrates strong chemical resistance with key process chemistries. VPF20 delivers a more cost-effective option than FFKM for applications with moderate temperatures and medium chemical demands.
It is ideal for manufacturing seals in transfer modules, load locks, equipment front end modules (EFEM) and vacuum handling systems, general purpose vacuum seals and flat panel display manufacturing equipment, and purity critical applications where standard black FKMs risk contamination.
>>Discover the entire Isolast® PureFab® range
The entire PureFab® range includes materials providing excellent performance in aggressive front-end processes including deposition, etch, ash/strip, plasma cleaning and thermal processing such as atomic layer deposition.
>>Find out more about Trelleborg semiconductor sealing solutions
* Fluorosurfactant-free materials mean that PFAS fluorosurfactants are not used intentionally. To the best of our knowledge and based on available information, these materials do not contain PFAS fluorosurfactants. However it cannot be guaranteed that these may not contain trace amounts of PFAS fluorosurfactants that occur unintentionally.