Reducing stiction force of elastomers in semiconductor processes
Seal-Glide® is a nanoscale surface treatment that improves on the friction performance of conventional coatings. It is applied through an innovative process, leading to a finish up to 50 times thinner than many conventional coatings. This technique also enables treatment of components with complex geometries and features, such as undercuts, that would otherwise be impossible with lacquer-based coatings.
Trelleborg Sealing Solutions is a key supplier of polymer technologies that meet the challenges of the semiconductor industry, providing aftermarket and original equipment manufacturers with sealing capabilities and products for today’s increasingly extreme fab and sub-fab environments. It offers decades of engineering and applications experience, as well as the latest knowledge in the design of high-precision, customized sealing solutions for critical semiconductor applications with extreme requirements for purity and plasma resistance.
Our Technical Director – Semiconductor, Technology and Innovation, Dr. Murat Gulcur, explains how Trelleborg’s Seal-Glide® nanoscale surface treatment eliminates stiction as well as its short- & long-term performance.
Trelleborg Sealing Solutions is a key supplier of polymer technologies that meet the challenges of the semiconductor industry, providing aftermarket and original equipment manufacturers with sealing capabilities and products for today’s increasingly extreme fab and sub-fab environments. It offers decades of engineering and applications experience, as well as the latest knowledge in the design of high-precision, customized sealing solutions for critical semiconductor applications with extreme requirements for purity and plasma resistance.
Our Technical Director – Semiconductor, Technology and Innovation, Dr. Murat Gulcur, explains how Trelleborg’s Seal-Glide® nanoscale surface treatment eliminates stiction as well as its short- & long-term performance.