Trelleborg Sealing Solutions adds two new additions to its Isolast® PureFab™ FFKM semiconductor material range.
Chris Busby, Semiconductor Segment Director at Trelleborg Sealing Solutions, says: “With extreme temperatures and increasingly more aggressive chemical precursors used in semiconductor environments, reliable sealing solutions are essential to prevent premature failure. At Semicon Europa we are launching two significant additions to our Isolast® PureFab™ range, specifically engineered to address the challenges of critical semiconductor sealing environments.”
Isolast® PureFab™ JPF40 is an ultra-high temperature perfluoroelastomer (FFKM) developed for demanding subfab applications and thermal processes, including rapid thermal processing (RTP), atomic layer deposition (ALD), and oxidation. The material offers unrivalled compression set performance at operating temperatures from +200 °C/+392 °F to +300 °C/+552 °F. This ensures sealing integrity for critical processes, withstanding peak application temperatures over +325 °C/+617 °F, the highest temperature capability of an elastomer material.
Isolast® PureFab™ JPF22 is an excellent all-round FFKM seal with superior chemical compatibility suitable for a wide range of semiconductor applications. The material offers excellent resistance to wet process chemicals and steam, as well as amine-based ALD precursors.
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