Speaker: Dr. Murat Gulcur
During the session "Advanced Sealing Technology for Semiconductor Processes”, Trelleborg expert Dr. Murat Gulcur will highlight our in-house manufacturing capabilities for Isolast® FFKM elastomers. lsolast® PureFab™ offers the ultimate high purity, plasma sealing performance at high temperatures in critical semiconductor production applications – including aggressive front-end processes including deposition, etch, ash/strip, plasma cleaning, and thermal processing such as atomic layer deposition.
>> Find out more about sealing technology for semiconductor applications