Semiconductor subfab processes support wafer processing equipment through vacuum generation, process gas and exhaust transport, and abatement. Seals used in these systems must withstand aggressive by-products, thermal cycling, mechanical motion and strict contamination limits.
Sealing requirements across semiconductor subfab systems
The appropriate sealing solution depends on the specific system requirements. Vacuum pumps require dynamic or rotary seals with low friction and wear resistance, while vacuum lines and abatement systems require leak-tight static seals that tolerate a broad range of chemicals, heat and flange misalignment.
Sealing solutions for vacuum pumps
Sealing vacuum pumps in semiconductor applications demands solutions that perform under extreme conditions, including chemical exposure, thermal cycling and mechanical wear. To maintain process integrity and prevent unplanned downtime, seals must meet strict limits on outgassing and particle generation.
Our advanced sealing solutions are engineered for these dynamic applications through:
Our advanced sealing solutions are engineered for these dynamic applications through:
- Superior materials: We leverage Turcon® PTFE-based compounds for superior performance and Isolast® PureFab® for exceptional purity and chemical resistance.
- Precision engineering: Seals are developed with precision designs and manufactured in cleanroom environments to ensure quality.
- Proven reliability: Every solution is validated with advanced simulation and lifetime prediction tools, ensuring reliable, long-term performance in critical subfab operations.
Vacuum lines sealing solutions
Maintaining process integrity in ultra-clean applications requires secure sealing for vacuum line pipe connectors. These seals must prevent leakage under both high pressure and vacuum while resisting aggressive chemicals, thermal cycling and mechanical misalignment.
We provide high-purity, chemically compatible materials to ensure leak-tight integrity. Our solutions, including Isolast® PureFab® materials and precision-engineered Isolast® K-Fab™ flange seal designs, are manufactured in cleanroom environments to the highest standards. We use advanced simulation tools to engineer reliable, long-life sealing solutions proven to perform in the most aggressive process conditions.
Abatement systems sealing solutions
Sealing abatement systems is challenging due to constant exposure to aggressive by-products, high temperatures and corrosive gases. Seals must withstand severe chemical, thermal and mechanical stress over long intervals to ensure safety, compliance and operational uptime. Trelleborg delivers advanced sealing solutions engineered for long-term reliability in these demanding conditions through:
- Optimized materials: Our ultra-pure, chemically compatible materials like Isolast® PureFab® are designed for minimal outgassing and extended service life.
- Consistent quality: Solutions are produced in cleanroom environments to ensure consistent, high-quality performance.
- Validated performance: Supported by advanced simulation and testing, our seals help you maintain safety, compliance and uptime in every abatement operation.