Wet Chemical Compatibility

Wet chemistry is a critical process within wafer and substrate processing. No single material is suitable for all semiconductor application environments.

Highly inert materials such as Polytetrafluoroethylene (PTFE) and Perfluoroelastomer (FFKM) inherently stand up to aggressive chemical conditions with little or no damage. Other materials are specifically formulated and tested for compatibility with specific environments; establishing the degree of attack, how much of each property is lost and where the application boundaries lie for each material.

Importance of Wet Chemical Compatibility:

• Materials available for a wide range of semiconductor applications
• Offer optimum performance in the most demanding environments
• Extends product life
• Lowers overall cost of production
• Materials and products withstand multiple cleaning cycles
• Any potential contamination from product deterioration is avoided
• Minimizes downtime
• Maximizes mean-time between planned maintenance
• Reduces trace metal contamination
• Minimizes impact on device yield
• Minimizes copper plate up in Electro/Electroless Chemical Deposition (ECD)