Wet chemistry is a critical process within wafer and substrate processing. No single material is suitable for all semiconductor application environments.
Highly inert materials such as Polytetrafluoroethylene (PTFE) and Perfluoroelastomer (FFKM) inherently stand up to aggressive chemical conditions with little or no damage. Other materials are specifically formulated and tested for compatibility with specific environments; establishing the degree of attack, how much of each property is lost and where the application boundaries lie for each material.
Importance of Wet Chemical Compatibility: